electron beam lithography Books

3 books in this genre

Nanofabrication by Ampere A. Tseng - Book Cover

Nanofabrication

Ampere A. Tseng

Electron-beam, X-ray, and ion-beam technology by Arnold W. Yanof - Book Cover

Electron-beam, X-ray, and ion-beam technology

Arnold W. Yanof

The physics of submicron lithography by Kamilʹ Akhmetovich Valiev - Book Cover

The physics of submicron lithography

Kamilʹ Akhmetovich Valiev