electron beam lithography Books
5 books in this genre
Nanofabrication
Ampere A. Tseng
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Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV
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Electron-beam, X-ray, and ion-beam technology
Arnold W. Yanof
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The physics of submicron lithography
Kamilʹ Akhmetovich Valiev
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Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V
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