microelectromechanical systems Books
31 books in this genre

Microengineering, MEMS, and Interfacing
Danny Banks

Proceedings of the International Conference of Mechatronics and Cyber-MixMechatronics – 2018
Gheorghe I. Gheorghe

Separation Methods in Microanalytical Systems
Jorg P. Kutter

Fabrication and design of resonant microdevices
Behraad Bahreyni

Vlsi Microphotonics
El-Hang Lee

MHS'98
International Symposium on Micromechatronics and Human Science (9th 1998 Nagoya-shi, Japan)

Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models (Microtechnology and MEMS)
Tamara Bechtold

Biomaterials for Mems
Mu Chiao

Optomechatronic actuators, manipulation, and systems control
Yukitoshi Otani

Micromechanics and nanoscale effects
Vasyl Michael Harik

Design, test, integration and packaging of MEMS/MOEMS 2001
B. Courtois

Microelectronic structures and MEMS for optical processing III
M. Edward Motamedi

Sensor technology in the Netherlands
A. van den Berg

Microactuators
Massood Tabib-Azar

Smart devices and machines for advanced manufacturing
Lihui Wang

Micromechanical Photonics (Microtechnology and MEMS)
H. Ukita

Microelectromechanical structures for materials research
Stuart B. Brown

Reliability, testing, and characterization of MEMS/MOEMS
Rajeshuni Ramesham

Bio-MEMS
Wanjun Wang

Nanotechnological Basis For Advanced Sensors
Perica Paunovic