microlithography Books
17 books in this genre
Microlithography
James R. Sheats
16th European Conference on Mask Technology for Integrated Circuits and Microcomponents
European Conference on Mask Technology for Integrated Circuits and Microcomponents (16th 1999 Munich, Germany)
Optical microlithography V
Sub-half-micron lithography for ULSIs
Shinji Matsui
22nd Annual BACUS Symposium on Photomask Technology
Symposium on Photomask Technology (22nd 2002 Monterey, Calif.)
Semiconductor Lithography
Wayne M. Moreau
22nd European Mask and Lithography Conference
Uwe F. Behringer
Scanning probe lithography
Hyongsok T. Soh
Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198)
Harry J. Levinson
Etching in microsystem technology
J. M. Köhler
Optical microlithography XII
NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies
M. Gentili
16th Annual Symposium on Photomask Technology and Management
Reynolds, James A.
11th annual Symposium on Photomask Technology
Symposium on Photomask Technology (11th 1991 Sunnyvale, Calif.)
Microlithographic techniques in IC fabrication
Chris A. Mack
Photomask fabrication technology
Benjamin G. Eynon
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
European Conference on Mask Technology for Integrated Circuits and Microcomponents (18th 2002 Munich, Germany)