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Plasma surface interactions in controlled fusion devices
International Conference on Plasma Surface Interactions in Controlled Fusion Devices 1978 Abingdon, England)
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Sputtering by Particle Bombardment II
R. Behrisch
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Sputtering Materials For Vlsi And Thin Film Devices
Jaydeep Sarkar
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Ion bombardment modification of surfaces
Roger Kelly
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Sputtering by particle bombardment
Rainer Behrisch
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